Tribology in Chemical-Mechanical Planarization
by Hong Liang
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| Publisher: | Taylor & Francis Group |
| Published In: | 01-Mar-2005 |
| ISBN-10: | 0824725670 |
| ISBN-13: | 9780824725679 |
| Binding Type: | Hardback |
| Weight: | 1.13 lbs |
| Pages: | pp. 185, 24 equations |
The Title "Tribology in Chemical-Mechanical Planarization 1st Edition" is written by Hong Liang. This book was published in the year 2005. The ISBN number 0824725670|9780824725679 is assigned to the Hardback version of this title. The book displayed here is a 1st Edition edition. This book has total of pp. 200 (Pages). The publisher of this title is Taylor & Francis Group. We have about 143359 other great books from this publisher.